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Zeta Systems
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- Zeta 20
- Zeta 200 Automated
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Back to 
All Products
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  LED Substrate Measure diameter, pitch and height of LED substrate features automatically; image pre-etch PR and postetch cones/domes
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  PV contact High dynamic range enables imaging of high-reflectance metal on low reflectance nitride; measure AR films as well as metal deposition
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  BioMems The Zeta Microscopes can quickly and accurately measure very deep features over wide areas for rapid analysis of micro-channels.
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  VCSEL etched pillars The Zeta system easily images the 3D structure of Vertical-Cavity Surface Emitting Laser
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- True Color 3D Imaging
- Sub-micron Metrology:
Step height, linear & areal roughness,
angle, dimensions
- High Roughness and Low Reflectivity
samples
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- Deep channels and other high-aspect
ratio features
- Transmissive (backlight) stage option
- Film thickness & DIC options
- Versatile application software
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The Zeta microscope is a fully-integrated surface measurement system that provides advanced 3D imaging and metrology features in a flexible, cost-effective package.
Zeta Instruments’ proprietary focus map technology enables rapid imaging of PSS, solar cells, fluid microchannels, and other surfaces that more costly systems cannot easily handle. Since there is no sample contact and very little system maintenance, Zeta metrology systems deliver an unparalleled level of performance with minimal cost of ownership. |
Standard Zeta-20 System
Zeta 20 Features |
Automated Zeta-200 Series
Zeta 200/280 Features |
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